in stock#
Brand/ Manufacturer:
NIKONDimensions:
6.2 cm x 38.6 cm x 17.3 cmWeight:
0.62 kgCountry of Origin: :
USADescription:
NIKON 4S015-173 NK-C304-40 Processor Control Board
Mfr. Part Number: |
4S015-173 NK-C304-40 |
Manufacturer: |
NIKON |
Description: | NIKON 4S015-173 NK-C304-40 Processor Control Board |
Full Description: | NIKON 4S015-173 NK-C304-40 Processor Control Board Exposure light source KrF excimer laser (248 nm wavelength) |
Status: |
In stock |
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Resolution ≦ 150 nm
NA 0.68
Exposure light source KrF excimer laser (248 nm wavelength)
Reduction ratio 1:4
Exposure field 25 × 33 mm
Alignment accuracy (EGA, |M| + 3σ) ≦ 35 nm
• Configured for 200 mm wafers
• Light source: KrF laser at 248 nm
• Resolution 180 nm, NA: 0.68
• Exposure field size: 25 x 33 mm
• Stepping precision of 20 nm
• Throughput of 120 wafers per hour
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General |
|
Manufacturers |
NIKON |
Brand |
NIKON |
Part Number/Catalog No. |
4S015-173 NK-C304-40 |
Status |
In stock |
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