4S018-713-1 | NSR-S306C NIKON LIB-I/F Board

in stock#

Brand/ Manufacturer:
NIKON
Dimensions:
6.2 cm x 38.6 cm x 17.3 cm
Weight:
0.62 kg
Country of Origin: :
USA
Description:
NIKON 4S018-713-1 NSR-S306C LIB-I/F Board

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Mfr. Part Number:	4S018-713-1 NSR-S306C

Manufacturer:	NIKON

Description:	AMETEK 80-224900-90 Circuit Board NIKON 4S018-713-1 NSR-S306C LIB-I/F Board

Full Description:	NIKON 4S018-713-1 NSR-S306C LIB-I/F Board Exposure light source ArF excimer laser (193 nm wavelength)

Status:	In stock

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Moore Automation Limited is not affiliated with or a distributor for . The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.

Resolution ≦ 100 nm
NA 0.78
Exposure light source ArF excimer laser (193 nm wavelength)
Reduction ratio 1:4
Exposure field 25 × 33 mm
Alignment accuracy (EGA, |M| + 3σ) ≦ 20 nm
Main Features
• High Resolution and Wide Exposure Fields
The NSR-S306C features lens-based scanning, and provides a wide exposure area of 25 x 33mm. It also features a state-of-the-art N.A. 0.78 projection lens and offers 100nm or better resolution while efficiently mass producing cutting-edge devices.
• Improved Throughput and Machine Stability
By employing a newly developed body, the influence of vibration and temperature on the equipment was reduced to a minimum. In addition, the NSR-S306C features improved throughput of 135/hour or more for 200mm wafers and 85/hour or more for 300mm wafers

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General
Manufacturers	NIKON
Brand	NIKON
Part Number/Catalog No.	4S018-713-1 NSR-S306C
Status	In stock

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